1.1* Scope. This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defned as a cleanroom or clean zone, or both. 1.2* Purpose. This standard is intended to provide reasonable safeguards for the protection of facilities containing clean‐ rooms from fre and related hazards. These safeguards are intended to provide protection against injury, loss of life, and property damage. 1.3 Retroactivity. The provisions of this standard refect a consensus of what is necessary to provide an acceptable degree of protection...