Standard for the Protection of Semiconductor Fabrication Facilities

1.1* Scope. This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defned as a cleanroom or clean zone, or both.
1.2* Purpose. This standard is intended to provide reasonable safeguards for the protection of facilities containing clean‐ rooms from fre and related hazards. These safeguards are intended to provide protection against injury, loss of life, and property damage.
1.3 Retroactivity. The provisions of this standard refect a consensus of what is necessary to provide an acceptable degree of protection from the hazards addressed in this standard at the time the standard was issued.
1.3.1 Unless otherwise specifed, the provisions of this stand‐ ard shall not apply to facilities, equipment, structures, or installations that existed or were approved for construction or installation prior to the effective date of the standard. Where specifed, the provisions of this standard shall be retroactive.
1.3.2 In those cases where the authority having jurisdiction determines that the existing situation presents an unacceptable degree of risk, the authority having jurisdiction shall be permitted to apply retroactively any portions of this standard deemed appropriate.
1.3.3 The retroactive requirements of this standard shall be permitted to be modifed if their application clearly would be impractical in the judgment of the authority having jurisdiction, and only where it is clearly evident that a reasonable degree of safety is provided.
1.4 Equivalency. Nothing in this standard is intended to prevent the use of systems, methods, or devices of equivalent or superior quality, strength, fre resistance, effectiveness, durability, and safety over those prescribed by this standard.
1.4.1 Technical documentation shall be submitted to the authority having jurisdiction to demonstrate equivalency.
1.4.2 The system, method, or device shall be approved for the intended purpose by the authority having jurisdiction.
1.4.3* Alternative systems, methods, or devices approved as equivalent by the authority having jurisdiction shall be recognized as being in compliance with this standard.
1.5* Units. Metric units of measurement in this standard are in accordance with the modernized metric system known as the International System of Units (SI). The liter unit, which is not part of but is recognized by SI, is commonly used in international fre protection. Conversion factors for SI units are found in Table 1.5.